ResearchPublikationen
Uncertainty quantification in polysilicon MEMS through on-chip testing and reduced-order modelling.

Uncertainty quantification in polysilicon MEMS through on-chip testing and reduced-order modelling.

Categories Proceedings
Year 2017
Authors Ramin Mirzazadeh, Saeed Eftekhar Azam, Eelco Jansen, Stefano Mariani
Published In 18th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE ), Dresden, Germany
DOI 10.1109/EuroSimE.2017.7926242