Uncertainty quantification in polysilicon MEMS through on-chip testing and reduced-order modelling.
| Categories |
Proceedings |
| Year | 2017 |
| Authors | Ramin Mirzazadeh, Saeed Eftekhar Azam, Eelco Jansen, Stefano Mariani |
| Published In | 18th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE ), Dresden, Germany |
| DOI | 10.1109/EuroSimE.2017.7926242 |
