ForschungPublikationen
Uncertainty quantification in polysilicon MEMS through on-chip testing and reduced-order modelling.

Uncertainty quantification in polysilicon MEMS through on-chip testing and reduced-order modelling.

Kategorien Konferenzbeiträge
Jahr 2017
Autoren Ramin Mirzazadeh, Saeed Eftekhar Azam, Eelco Jansen, Stefano Mariani
Veröffentlicht in 18th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE ), Dresden, Germany
DOI 10.1109/EuroSimE.2017.7926242